Helium mass spectrometer leak detector was developed in the 1940s. After more than half a century of application and development, it has made brilliant achievements. It can be said that it is everywhere from aerospace, military industry, scientific engineering, nuclear industry to light industry, medical treatment, instrumentation, automobile and refrigeration. Vacuum leak detection has two aspects in terms of its development, that is, on the one hand, the leak detection instrument itself, and on the other hand, the development of leak detection technology.
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